All Aluminum alloy Stainless steel

All X轴 XY轴 Z轴 XYZ轴 θ轴 α轴 αβ轴 XYθ轴

All 10μm以内 15μm以内 0.05°

All ±0.5μm ±1μm ±5μm ±0.01° 0.003° ±0.005°

All 2.5mm/s 3.7mm/s 10mm/s 20mm/s 40mm/s 20°/s 30°/s 33°/s 64°/s 102°/s

All 40mm*40mm 60mm*60mm 60mm*70mm 60mm*80mm 60mm*88mm 70mm*70mm 80mm*80mm 80mm*100mm 100mm*100mm 120mm*120mm Φ39 Φ40 Φ59 Φ60 Φ80

All 4mm 6mm 8mm ±10mm ±12mm 12mm 15mm ±15mm 20mm 25mm 30mm 40mm 50mm 75mm 100mm 150mm 200mm 300mm ±5° ±6° ±8° ±8.5° ±10° 11° 17° 20° 360°