Alignment Stage
-
ASXXY15180801-62-0806-D
.
- Size(mm)
- 150mm*150mm
- Positional repeatability(μm):
- ±5μm
- Angle of travel(°)
- ±3°
- Dynamic load(kg):
- 15kg
- Lead screw specifications:
- 0801
- Stroke length(mm):
- ±4mm
- Number of axles:
- XXY
-
ASXXY20210802-70-1411-42F1
.
- Size(mm)
- 200mm*200mm
- Positional repeatability(μm):
- ±2μm
- Angle of travel(°)
- ±5.5°
- Dynamic load(kg):
- 15kg
- Lead screw specifications:
- 0802
- Stroke length(mm):
- ±7mm
- Number of axles:
- XXY
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